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| General information |
| Type | CPU / Microprocessor |
| Family | Intel Mobile Pentium 4 |
| Processor number | 538 |
| Part number | RK80546HE0881M |
| Processor markings | 80546HE0881M |
| Frequency (GHz) | 3.2 |
| Bus speed (MHz) | 533 |
| Package type | 478-pin FC-mPGA4 |
| Socket type | Socket 478 (mPGA478B) |
| Architecture / Microarchitecture / Other |
| CPUID | 0F41h |
| Core stepping | E0 |
| Processor core | Prescott |
| Manufacturing technology (micron) | 0.09 |
| L2 cache size (KB) | 1024 |
| Notes on sSpec QZ51 |
- Engineering sample.
- There is also QZ51ES Pentium III Tualatin processor in 370-pin(?) FC-PGA2 package. That processor may be marked Thermal.
- Some parts may have core stepping D0 and CPUID 0F34h
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